Unlike the electron beam used in scanning and transmission electron microscopy (SEM, TEM), the beam in a focused ion beam system (FIB) is composed of gallium (Ga) ions. The ions forming the structure ...
The Hitachi FB-2000A FIB uses a beam of focused high-energy (30 kV) gallium ions to remove material in a very controlled manner from inorganic specimens. The FB-2000A is a single beam system; that is, ...
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